F. Lofink

collaborators

2 papers

cond-mat.mtrl-sci2026

Beyond the Parasitic Limit: A Nanoprobing Framework for De-embedding Intrinsic Ferroelectric Properties at the Deep Sub-Micrometer Scale

Niklas Kyoushi, Georg SchÃ¶nweger, Ole Gronenberg +4

The continued scaling of ferroelectric devices is critical for next-generation computing architectures, yet it is fundamentally challenged by a metrological bottleneck: at the deep…

cond-mat.mtrl-sci2025

Wafer scale reactive sputtering of highly oriented and ferroelectric Al $_{0.6}$ Sc $_{0.4}$ N from 300 mm AlSc Targets

Tom-Niklas Kreutzer, Muhammad Zubair Ghori, Md Redwanul Islam +4

This paper presents progress towards the large-scale manufacturability of piezo- and ferroelectric Al $_{1 - x}$ Sc $_{x}$ N thin films with very high Sc content. Al $_{0.6}$ Sc $_{0.4}$ N lay…

Beyond the Parasitic Limit: A Nanoprobing Framework for De-embedding Intrinsic Ferroelectric Properties at the Deep Sub-Micrometer Scale

Wafer scale reactive sputtering of highly oriented and ferroelectric Al0.6​Sc0.4​N from 300 mm AlSc Targets

Wafer scale reactive sputtering of highly oriented and ferroelectric Al $_{0.6}$ Sc $_{0.4}$ N from 300 mm AlSc Targets