22 citations · 54 across the 7 of their papers we have counts for
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Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions
Matthias Plock, Martin Hammerschmidt, Sven Burger +2
In optical nano metrology numerical models are used widely for parameter reconstructions. Using the Bayesian target vector optimization method we fit a finite element numerical mod…
Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction
Matthias Plock, Kas Andrle, Sven Burger +1
Parameter reconstructions are indispensable in metrology. Here, the objective is to to explain experimental measurements by fitting to them a parameterized model of the measure…
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Matthias Plock, Sven Burger, Philipp-Immanuel Schneider
Parameter reconstruction is a common problem in optical nano metrology. It generally involves a set of measurements, to which one attempts to fit a numerical model of the measureme…