8 papers
Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Omar Barrera, Bryan T. Bosworth, Taran Anusorn +10
Compact, high-performance components in millimeter-wave (mmWave) communication systems demand new acoustic filter technology at increasingly higher frequencies. Among various promi…
50 GHz Piezoelectric Acoustic Filter
Omar Barrera, Jack Kramer, Lezli Matto +5
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric th…
19.3 GHz Acoustic Filter with High Close-in Rejection in Tri-layer Thin-Film Lithium Niobate
Omar Barrera, Sinwoo Cho, Jack Kramer +3
Acoustic filters are preferred front-end solutions at sub-6 GHz due to their superior frequency selectivity compared to electromagnetic (EM) counterparts. With the ongoing developm…
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Acoustic resonators above 100 GHz
Jack Kramer, Bryan T. Bosworth, Lezli Matto +8
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics pus…