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cs.OH2008★ 2 cited
Simulation of an Electrostatic Energy Harvester at Large Amplitude Narrow and Wide Band Vibrations
Lars Geir Whist Tvedt, Lars-Cyril Julin Blystad, Einar Halvorsen
An electrostatic in-plane overlap varying energy harvester is modeled and simulated using a circuit simulator. Both linear and nonlinear models are investigated. The nonlinear mode…
cs.OH2008
Measurement of Large Forces and Deflections in Microstructures
Kai Axel Hals, Einar Halvorsen, Xuyuan Chen
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural fa…