most citedComparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models

1 citations · 1 across the 1 of their papers we have counts for

collaborators

1 paper

cs.OH2008★ 1 cited

Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models

T. Veijola, Giorgio De Pasquale, Aurelio Somà

Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of th…