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cs.OH2008★ 1 cited
Geometrical Variation Analysis of an Electrothermally Driven Polysilicon Microactuator
M. Shamshirsaz, M. Maroufi, M. B. Asgari
The analytical models that predict thermal and mechanical responses of microactuator have been developed. These models are based on electro thermal and thermo mechanical analysis o…
cs.OH2008★ 9 cited
Analysis of polysilicon micro beams buckling with temperature-dependent properties
M. Shamshirsaz, M. Bahrami, M. B. Asgari +1
The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of sus…