Direct measurement of 2DEG states in shallow Si:Sb $\hat{I}´$-layers

Frode S. Strand, Simon P. Cooil, Quinn T. Campbell +13

We investigate the electronic structure of high-density layers of Sb dopants in a silicon host, so-called Si:Sb $\hat{I}´$-layers. We show that, in spite of the known challenges in produ…