2 papers
physics.app-ph2024
Lossless photon flux sensing methodology for EUV and Soft X-ray metrology systems
Sven Weerdenburg, Roland Horsten, Wim Coene
We demonstrate a simple, lossless method for monitoring photon flux in short-wavelength metrology systems, with a particular focus on applications using high harmonic generation (H…
physics.optics2024
Mitigating tilt-induced artifacts in reflection ptychography via optimization of the tilt angles
Sander Senhorst, Yifeng Shao, Sven Weerdenburg +3
Ptychography in a reflection geometry shows great promise for non-destructive imaging of 3-dimensional nanostructures at the surface of a thick substrate. A major challenge to obta…