3 papers
eess.SY2024
Modeling and Design Optimization of a Linear Motor with Halbach Array for Semiconductor Manufacturing Technology
Sajjad Mohammadi, Jeffrey H. Lang, James L. Kirtley +1
This paper presents analytical modeling and design of a high-acceleration, low-vibration slotless double-sided linear motor with an arbitrary Halbach array for lithography machines…
eess.SY2024
An Actuator with Magnetic Restoration, Part II: Drive Circuit and Control Loops
Sajjad Mohammadi, William R. Benner, James L. Kirtley +1
In part II, an op-amp-based drive is proposed and designed. Subsequently, a very accurate model for the drive circuit and the current loop is developed as a simulation platform, wh…
eess.SY2024
An Actuator with Magnetic Restoration, Part I: Electromechanical Model and Identification
Sajjad Mohammadi, William R. Benner, James L. Kirtley +1
Electromechanical models are crucial in the design and control of motors and actuators. Modeling, identification, drive, and current control loop of a limited-rotation actuator wit…