2 papers
physics.optics2024
Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays
Leonhard M. Lohr, Richard Ciesielski, Vinh-Binh Truong +1
Scatterometry is a tested method for measuring periodic semiconductor structures. Since the sizes of modern semiconductor structures have reached the nanoscale regime, the challeng…
physics.optics2024
Core-Shell Nanoparticle Resonances in Near-Field Microscopy Revealed by Fourier-demodulated Full-wave Simulations
Dinghe Dai, Richard Ciesielski, Arne Hoehl +2
We present a detailed investigation of the near-field optical response of core-shell nanoparticles using Fourier-demodulated full-wave simulations, revealing significant modificati…