Dependence of Electrostatic Patch Force Evaluation on the Lateral Resolution of Kelvin Probe Force Microscopy

Kun Shi, Pengshun Luo, Jinquan Liu +2

Kelvin Probe Force Microscopy (KPFM) is widely used to measure the surface potential on samples, from which electrostatic patch force can be calculated. However, since the KPFM mea…