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cond-mat.mtrl-sci2021
A flexible film thermocouple temperature sensor
Yulong Bao, Bin Xu, Huang Wang +4
This article introduces a thin-film thermocouple temperature sensor with symmetrical electrode structure. It uses PI film as a flexible substrate. Cu film and CuNi film made by MEM…
cond-mat.mtrl-sci2021
A capacitive flexible tactile sensor
Dandan Yuan, Haoxin Shu, Yulong Bao +2
In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal…