2 papers
physics.plasm-ph2021
Discharge structure of Ar/Cl2 inductively coupled plasma: A cyclic study of discharge conditions at fixed power
Shu-Xia Zhao, An-Qi Tang
Discharge structure refers to the morphology of different plasma quantities, such as electron temperature, reaction rate, plasma potential, mass flux, net charge and species densit…
physics.plasm-ph2021
Study of transport process and discharge structure of inductively coupled electronegative plasmas via fluid model and analytic theory collaboration
Shu-Xia Zhao, An-Qi Tang
The discharge structure of inductively coupled plasma is studied via fluid simulation and analytic theory collaboration. At low pressure, the discharge is stratified by the double…