Movable Gate MOSFETs as Readout Devices for Cantilever-Based Nano-Electromechanical Sensors

Z. Geng, A. Hessel, S. C. Scholz +3

This work proposes a novel readout mechanism for highly sensitive cantilever-based mass sensors using movable-gate (MG) MOSFETs. Traditional dynamic-mode cantilever sensors measure…