4 citations · 4 across the 3 of their papers we have counts for
3 papers
Long-Term Aging Study of a Silicon Nitride Nanomechanical Resonator
Michel Stephan, Alexandre Bouchard, Timothy Hodges +4
Short-term changes in the resonance frequency of silicon nitride (SiN) nanomechanical resonators can be measured very precisely due to low thermomechanical fluctuations resulting f…
Vibration Sensitivity of one-port and two-port MEMS microphones
Francis Doyon-D'Amour, Carly Stalder, Timothy Hodges +5
Micro-electro-mechanical system (MEMS) microphones (mics) with two acoustic ports are currently receiving considerable interest, with the promise of achieving higher directional se…
Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation
Gengyang Mu, Nikaya Snell, Chang Zhang +5
We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon…