3 papers
cond-mat.supr-con2024
Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber
Maksim V. Shibalov, Ilya M. Asharchuk, Evgeniy O. Epifanov +5
This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength…
cond-mat.supr-con2023
Superconducting TSV contact for cryoelectronic devices
Ivan Filippov, Alexandr Anikanov, Aleksandr Rykov +6
This work focuses on the fabrication of niobium through silicon vias (TSV) superconductors interconnects. The effect of supercycle of sequential oxidation and chemical etching proc…
physics.optics2021
Enchanced reflectance SiN / SiO DBR mirror based on TEOS precursor fabricated by PECVD method
I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov +6
In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH) and the silicon-organic precursor tetraethoxysilane (TE…