3 papers
physics.plasm-ph2023
Plasma sheath tailoring by a magnetic field for three-dimensional plasma etching
E. Jüngling, S. Wilczek, T. Mussenbrock +2
Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in microstructuring applications. A method is proposed to reach a controllable 3D structure by using…
physics.plasm-ph2023
Interactions between flow fields induced by surface dielectric barrier discharge arrays
Alexander Böddecker, Maximilian Passmann, Sebastian Wilczek +6
This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds…
physics.plasm-ph2023
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…