2 papers
physics.ins-det2023
Thin-film PMUTs: A Review of 40 Years of Research
Kaustav Roy, Joshua En-Yuan Lee, Chengkuo Lee
A concise review on the thin-film PMUTs, which has been one of the rather important research topics amongst microultrasound experts is being reported. It has been rigorously survey…
physics.app-ph2022
Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications
Antony Jeyaseelan A, Vijayendra Shastri, Kaustav Roy +1
For the past two decades piezo MEMS technology are emerging for its low power consumption of ultrasonic sensing and actuation devices for biomedical applications. Still researchers…