3 citations · 4 across the 3 of their papers we have counts for
3 papers
stat.ML2024
Tensor-based process control and monitoring for semiconductor manufacturing with unstable disturbances
Yanrong Li, Juan Du, Fugee Tsung +1
With the development and popularity of sensors installed in manufacturing systems, complex data are collected during manufacturing processes, which brings challenges for traditiona…
cs.LG2023★ 1 cited
MFRL-BI: Design of a Model-free Reinforcement Learning Process Control Scheme by Using Bayesian Inference
Yanrong Li, Juan Du, Wei Jiang
Design of process control scheme is critical for quality assurance to reduce variations in manufacturing systems. Taking semiconductor manufacturing as an example, extensive litera…
eess.SY2021★ 3 cited
Reinforcement Learning for Process Control with Application in Semiconductor Manufacturing
Yanrong Li, Juan Du, Wei Jiang
Process control is widely discussed in the manufacturing process, especially for semiconductor manufacturing. Due to unavoidable disturbances in manufacturing, different process co…