Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation

K. B. Vinayakumar, A. Persaud, P. A. Seidl +5

We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator…