Granular-composite-like electrical transport properties of polycrystalline cubic TaN${}_x$ thin films prepared by rf sputtering method

Ran Li, Xiu-Zhi Duan, Xin Zhu +3

We have systematically investigated the electrical transport properties of polycrystalline TaN${}_x$ ($0.83$$\lesssim$$x$$\lesssim$1.32) films with rocksalt structure from 300 down t…