Characterization and Optical Properties of Erbium doped As2S3 Films Prepared by Multi-layer Magnetron Sputtering

Wee Chong Tan, William T. Snider, Yifeng Zhou +4

As2S3 film doped with erbium is prepared using multi-layer magnetron sputtering. The optical properties were measured by reflectance spectroscopy, and its chemical composition is e…