2 citations · 6 across the 4 of their papers we have counts for
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Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy
Vic De Ridder, Bappaditya Dey, Victor Blanco +2
In semiconductor manufacturing, lithography has often been the manufacturing step defining the smallest possible pattern dimensions. In recent years, progress has been made towards…
SEMI-DiffusionInst: A Diffusion Model Based Approach for Semiconductor Defect Classification and Segmentation
Vic De Ridder, Bappaditya Dey, Sandip Halder +1
With continuous progression of Moore's Law, integrated circuit (IC) device complexity is also increasing. Scanning Electron Microscope (SEM) image based extensive defect inspection…
SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection
Vic De Ridder, Bappaditya Dey, Enrique Dehaerne +3
Continual shrinking of pattern dimensions in the semiconductor domain is making it increasingly difficult to inspect defects due to factors such as the presence of stochastic noise…