Large-Scale Fabrication of RF MOSFETs on Liquid-Exfoliated MoS2

Kuanchen Xiong, Lei Li, Asher Madjar +7

For the first time, thousands of RF MOSFETs were batch-fabricated on liquid-exfoliated MoS2 below 300 °C with nearly 100% yield. The large-scale fabrication with high yield allowed…