Probing the loss origins of ultra-smooth $\mathrm{S}{\mathrm{i}}_3{\mathrm{N}}_4$ integrated photonic waveguides

Martin H. P. Pfeiffer, Junqiu Liu, Arslan S. Raja +3

On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcom…