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most citedIn-situ electron-beam lithography of deterministic single-quantum-dot mesa-structures using low-temperature cathodoluminescence spectroscopy

108 citations · 190 across the 5 of their papers we have counts for

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cond-mat.mes-hall2013★ 108 cited

In-situ electron-beam lithography of deterministic single-quantum-dot mesa-structures using low-temperature cathodoluminescence spectroscopy

M. Gschrey, F. Gericke, A. Schüßler +6

We report on the deterministic fabrication of sub-um mesa structures containing single quantum dots by in-situ electron-beam lithography. The fabrication method is based on a two-s…