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20162023
most citedCSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperature

16 citations · 32 across the 3 of their papers we have counts for

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Showing 2022 · physics.opticsShow all

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physics.optics2022★ 6 cited

Design and fabrication of ridge waveguide-based nanobeam cavities for on-chip single-photon sources

Uğur Meriç Gür, Yuhui Yang, Johannes Schall +8

We report on the design of nanohole/nanobeam cavities in ridge waveguides for on-chip, quantum-dot-based single-photon generation. Our design overcomes limitations of a low-refract…