B. Ilic

most citedFabrication of micro fluidic cavities using Si-to-glass anodic bonding

17 citations · 33 across the 2 of their papers we have counts for

collaborators

2 papers

physics.app-ph2018★ 17 cited

Fabrication of micro fluidic cavities using Si-to-glass anodic bonding

N. Zhelev, T. S. Abhilash, R. G. Bennett +7

We demonstrate the fabrication of $\sim$ 1.08 $μ$ m deep microfluidic cavities with characteristic size as large as 7 mm $\times$ 11 mm or 11 mm diameter, using a silicon $-$ glass ano…

cond-mat.other2013★ 16 cited

Study of superfluid $^{3}$ He under nanoscale confinement. A new approach to the investigation of superfluid $^{3}$ He films

Lev Levitin, Robert Bennett, Andrew Casey +7

We review recent experiments in which superfluid $^{3}$ He has been studied under highly controlled confinement in nanofluidic sample chambers. We discuss the experimental challenges…

Fabrication of micro fluidic cavities using Si-to-glass anodic bonding

Study of superfluid 3He under nanoscale confinement. A new approach to the investigation of superfluid 3He films

Study of superfluid $^{3}$ He under nanoscale confinement. A new approach to the investigation of superfluid $^{3}$ He films