2 papers
physics.app-ph2018
Flow sensor based on the snap-through detection of a curved micromechanical beam
Yoav Kessler, Robert Ilic, Slava Krylov +1
We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-ther…
physics.flu-dyn2016
Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams
Yoav Kessler, Slava Krylov, Alex Liberzon
We report on a flow sensing approach based on deflection monitoring of micro beams buckled by the compressive thermal stress due to electrothermal Joules heating. The air stream co…