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20032021
most citedNanolithography based on real-time electrically-controlled indentation with an atomic force microscope for nanocontacts elaboration

66 citations · 74 across the 3 of their papers we have counts for

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cond-mat.mes-hall2003★ 66 cited

Nanolithography based on real-time electrically-controlled indentation with an atomic force microscope for nanocontacts elaboration

K. Bouzehouane, S. Fusil, M. Bibes +5

We report on the fabrication of nanocontacts by indentation of an ultrathin insulating photoresist layer deposited on various types of conductive structures. A modified atomic forc…