most citedDistribution of defect clusters in the primary damage of ion irradiated 3C-SiC

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physics.app-ph2018★ 31 cited

Distribution of defect clusters in the primary damage of ion irradiated 3C-SiC

C. Liu, I. Szlufarska

We report a statistical analysis of sizes and compositions of clusters produced in cascades during irradiation of SiC. The results are obtained using molecular dynamics (MD) simula…