2 papers
physics.plasm-ph2018
Observation of extreme-ultraviolet light emission from an expanding plasma jet with multiply-charged argon or xenon ions
A. G. Shalashov, A. V. Vodopyanov, I. S. Abramov +7
We report the first direct demonstration of possibility to generate the extreme ultraviolet (EUV) radiation with a freely expanding jet of dense plasma with multiply-charged ions s…
physics.plasm-ph2017
Extreme-ultraviolet light source for lithography based on an expanding jet of dense xenon plasma supported by microwaves
I. S. Abramov, E. D. Gospodchikov, A. G. Shalashov
We discuss a concept of a point-like source of the extreme ultraviolet (EUV) light based on a non-equilibrium microwave discharge in expanding jet of dense xenon plasma with multip…