4 papers
A single-step lithography process for reconfigurable SiN photonics with TiN heaters and Al interconnects
Leonardo Limongi, Rachele Favaretto, Lorenzo Baldessarini +6
Thermo-optic phase shifters are key building blocks in Silicon and Silicon Nitride-based reconfigurable photonic integrated circuits. They enable manipulating the phase of an optic…
Brillouin nonlinearity characterizations of a high refractive index silicon oxynitride platform
Kaixuan Ye, Akshay Keloth, Yvan Klaver +6
Silicon oxynitride (SiON) is a low-loss and versatile material for linear and nonlinear photonics applications. Controlling the oxygen-to-nitrogen (O/N) ratio in SiON provides an e…
SiN integrated photonic components in the Visible to Near-Infrared spectral region
Matteo Sanna, Alessio Baldazzi, Gioele Piccoli +3
Integrated photonics has emerged as one of the most promising platforms for quantum applications. The performances of quantum photonic integrated circuits (QPIC) necessitate a dema…
Permanent mitigation of loss in ultrathin SOI high-Q resonators using UV light
Gioele Piccoli, Martino Bernard, Mher Ghulinyan
In this paper, we demonstrate strip-loaded guiding optical components realized on a 27 nm ultra-thin SOI platform. The absence of physically etched boundaries within the guiding co…