27 citations · 34 across the 2 of their papers we have counts for
3 papers
Converting a superseded Raith electron beam pattern generator into an unattended Critical Dimension SEM
Will Gunn, Han-Hao Cheng, Daniel Peace +8
Design-based metrology of academic electron beam lithography (EBL) is bottlenecked by low-throughput imaging. For integrated photonics, where nanometre-scale structural variation c…
Free spectral range electrical tuning of a high quality on-chip microcavity
Christiaan Bekker, Christopher G. Baker, Rachpon Kalra +4
Reconfigurable photonic circuits have applications ranging from next-generation computer architectures to quantum networks, coherent radar and optical metamaterials. However, compl…
Strain effect in highly-doped n-type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement
Hoan-Phuong Phan, Tuan-Khoa Nguyen, Toan Dinh +8
This work reports the strain effect on the electrical properties of highly doped n-type single crystalline cubic silicon carbide (3C-SiC) transferred onto a 6-inch glass substrate…