2 papers
physics.plasm-ph2018
Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge
Jean-Maxime Orlac'H, Tatiana Novikova, Vincent Giovangigli +2
In this paper, we use a fluid model to simulate the excitation of a hydrogen radio-frequency discharge, and employ tailored voltage waveforms to assess the effect of charged specie…
physics.plasm-ph2018
Multi frequency matching for voltage waveform tailoring
Frederik Schmidt, Julian Schulze, Erik Johnson +5
Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribu…