2 papers
physics.acc-ph2018
Multi-beam RF accelerators for ion implantation
Peter A. Seidl, Arun Persaud, Diego Di Domenico +10
We report on the development of a radio frequency (RF) linear accelerator (linac) for multiple-ion beams that is made from stacks of low cost wafers. The accelerator lattice is com…
physics.acc-ph2018
Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation
K. B. Vinayakumar, A. Persaud, P. A. Seidl +5
We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator…