Characterization of Pd/Y multilayers with B4C barrier layers using GIXR and x-ray standing wave enhanced HAXPES

M. Y. Wu, Q. S. Huang, K. Le Guen +6

Pd/Y multilayers are high reflectance mirrors designed to work in the 7.5-11 nm wavelength range. Samples, prepared by magnetron sputtering, are deposited with or without B4C barri…