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physics.plasm-ph2023
Breakdown modes of capacitively coupled plasma II: unsustainable discharges
Hao Wu, Ran An, Dong Zhong +2
In this work, the one-dimensional implicit particle-in-cell/Monte-Carlo collision code (PIC/MCC) is used to study the discharge of a capacitively coupled plasma (CCP) under extreme…
physics.plasm-ph2023
Breakdown modes of capacitively coupled plasma I: transitions from glow discharge to multipactor
Hao Wu, Ran An, Dong Zhong +2
In this work, a one-dimensional direct implicit particle-in-cell/Monte Carlo collision (PIC/MCC) code is used to study the capacitive discharge driven under 60 MHz rf power in the…
physics.plasm-ph2023
Electrical Characteristics of the GEC Reference Cell with Impedance Matching: A Two-Dimensional PIC/MCC Modeling Study
Zili Chen, Hongyu Wang, Shimin Yu +5
In this paper, the electrical characteristics of the Gaseous Electronics Conference (GEC) reference cell with impedance matching are investigated through a two-dimensional electros…