A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500°C in Air

Savannah R. Benbrook, Caitlin A. Chapin, Ruochen Lu +3

This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO${}_3$) MEMS resonator array up to 500°C in air.…