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cs.CV2024
LithoHoD: A Litho Simulator-Powered Framework for IC Layout Hotspot Detection
Hao-Chiang Shao, Guan-Yu Chen, Yu-Hsien Lin +4
Recent advances in VLSI fabrication technology have led to die shrinkage and increased layout density, creating an urgent demand for advanced hotspot detection techniques. However,…
cs.CV2022★ 1 cited
Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based Novelty Detection and Active Learning
Hao-Chiang Shao, Hsing-Lei Ping, Kuo-shiuan Chen +5
Learning-based pre-simulation (i.e., layout-to-fabrication) models have been proposed to predict the fabrication-induced shape deformation from an IC layout to its fabricated circu…