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physics.app-ph2020
Analysis of Electrostatic MEMS Using Energy-Charge Landscape
Raghuram Tattamangalam Raman, Arvind Ajoy, Revathy Padmanabhan
A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to an…
physics.app-ph2019
Dynamics of Ferroelectric Negative Capacitance -- Electrostatic MEMS Hybrid Actuators
Raghuram TR, Arvind Ajoy
We propose a framework to model ferroelectric negative capacitance: electrostatic Micro Electro Mechanical Systems (MEMS) hybrid actuators and analyze their dynamic (step input) re…