most citedThe Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane

7 citations · 7 across the 1 of their papers we have counts for

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1 paper

physics.app-ph2020★ 7 cited

The Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane

Jing Wu, Xiaofeng Zhao, Yibo Liu +1

A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and…