2 papers
physics.optics2026
Practical Evaluation of FFT-Based Thickness Extraction for Thick-Film Reflectometry
Zimu Zhou, Enrique A. Lopez-Guerra, Michael Kwan +1
Fast Fourier transform (FFT) is widely used for thick-film reflectometry because of its simplicity and computational efficiency. However, its performance under practical thick-film…
physics.optics2025
Extending Reflectometry Range, A Zero-Crossing Algorithm for Thick Film Metrology
Zimu Zhou, Enrique Lopez-Guerra, Iulica Zana +7
Accurate and high-efficiency film metrology remains a key challenge in High-Volume Manufacturing (HVM), where conventional spectroscopic reflectometry and white light interferometr…