2 papers
physics.optics2021
Analysing the linearised radially polarised light source for improved precision in strain measurement using micro-Raman spectroscopy
V. Prabhakara, T. Nuytten, H. Bender +3
Strain engineering in semiconductor transistor devices has become vital in the semiconductor industry due to the ever increasing need for performance enhancement at the nanoscale.…
physics.app-ph2020
HAADF-STEM block-scanning strategy for local measurement of strain at the nanoscale
Viveksharma Prabhakara, Daen Jannis, Giulio Guzzinati +3
Lattice strain measurement of nanoscale semiconductor devices is crucial for the semiconductor industry as strain substantially improves the electrical performance of transistors.…