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physics.plasm-ph2026
Spatially-resolved methane decomposition in a short glow discharge: insights into suprathermal hydrogen and radical chemistry
Shurik Yatom
This work presents the spatially resolved mapping of methane decomposition chemistry in a short direct-current glow discharge, revealing segregated zones for dissociation and polym…
physics.plasm-ph2026
Multi-Diagnostic Characterization of Laser-Produced Tin Plasmas for EUV Lithography
Stanislav Musikhin, Anatoli Morozov, Alec Griffith +2
We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the…