51 citations · 77 across the 2 of their papers we have counts for
2 papers
quant-ph2022★ 26 cited
Qubit-compatible substrates with superconducting through-silicon vias
K. Grigoras, N. Yurttagül, J. -P. Kaikkonen +21
We fabricate and characterize superconducting through-silicon vias and electrodes suitable for superconducting quantum processors. We measure internal quality factors of a million…
physics.app-ph2020★ 51 cited
High Quality 3-Dimensional Aluminum Microwave Cavities
M. Kudra, J. Biznárová, F. Roudsari +5
We present a comprehensive study of internal quality factors in superconducting stub-geometry 3-dimensional cavities made of aluminum. We use wet etching, annealing and electrochem…