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cond-mat.mtrl-sci2023
Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth
Peco Myint, Jeffrey M. Woodward, Chenyu Wang +6
Sophisticated thin film growth techniques increasingly rely on the addition of a plasma component to open or widen a processing window, particularly at low temperatures. However, t…
cond-mat.mtrl-sci2023
Local step-flow dynamics in thin film growth with desorption
Xiaozhi Zhang, Jeffrey G. Ulbrandt, Peco Myint +6
Desorption of deposited species plays a role in determining the evolution of surface morphology during crystal growth when the desorption time constant is short compared to the tim…