The development of IBIC microscopy at the 100 kV ion implanter of the University of Torino (LIUTo) and the application for the assessment of the radiation hardness of a silicon photodiode

Emilio Corte, Alberto Bortone, Elena Nieto Hernández +6

The Ion Beam Induced Charge (IBIC) technique is widely used to characterize the electronic properties of semiconductor materials and devices. Its main advantage over other charge c…