A Novel Approach for Fault Detection and Failure Analysis of CMOS Copper Metal Stacks

Gregor Hieronymus Eberwein, Gianluca Aglieri Rinella, Daniela Bortoletto +16

For the Inner Tracking System 3 (ITS3) upgrade, the ALICE experiment at CERN requires monolithic active pixel sensors of dimensions up to 97~mm$\times$266~mm, occupying a large…