Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas I: triple-frequency discharges

Hao Zheng, Jidun Wu, Qilu Cao +2

An 18-level argon collisional radiative model (CRM) suitable for low pressure was established. The model can be solved by combining the optical emission spectroscopy (OES) with Lan…